Michigan State University's Facility for Rare Isotope Beams (FRIB) received $49.7 million from the U.S. Department of Energy. The funding will be used to build the High-Transmission Beam Line, part of ...
Electron-beam inspection is proving to be indispensable for finding critical defects at sub-5nm dimensions. The challenge now is how to speed up the process to make it economically palatable to fabs.
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