When classic 2D scaling dominated, the industry’s center of gravity was disinflationary: Chip average selling prices (ASPs) trended lower, and wafer fab equipment (WFE) growth was intermittent. In ...
Abstract: Cluster tools are extensively used for processing wafers in semiconductor manufacturing. To enhance the throughput of cluster tools, concurrent processing of multiple types of wafers has ...
Abstract: This paper presents an 8-bit 1.6GS/s successive-approximation-register analog-to-digital converter (SAR ADC) with alternate comparators. To enhance dynamic performance and speed, a ...